Template for measuring edge width and method of using

US 6,499,222 B1
Template for measuring edge width and method of using
Hung-Ju Chien, Hsinchu (Taiwan); Ying-Hsiang Chen, Hsin-Chu (Taiwan); Wen-Kung Cheng, Mai-Li (Taiwan); and Yin-Lang Wang, Taichung (Taiwan)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd, Hsin Chu (Taiwan)
Filed on 29-Jan-1999, as Appl. No. Taiwan Semiconductor Manufacturing Company, Ltd, Hsin Chu (Taiwan)
Int. Cl.7G01B 3/14

US 6,499,222 B1 Template for measuring edge width and method of using Hung-Ju Chien, Hsinchu (Taiwan); Ying-Hsiang Chen, Hsin-Chu (Taiwan); Wen-Kung Cheng, Mai-Li (Taiwan); and Yin-Lang Wang, Taichung (Taiwan) Assigned to Taiwan Semiconductor Manufacturing Company, Ltd, Hsin Chu (Taiwan) Filed on Jan. 29, 1999, as Appl. No. 9/240,414. Int. Cl.7G01B 3/14 U.S. Cl. 338212;562 16 Claims 1. A template for measuring the width of an edge portion of a disk having a different appearance than a center portion of the disk comprising: a substantially transparent sheet having a contour substantially the same as the contour of a disk to be measured, a first mark made along a peripheral edge of said sheet at a first distance from said peripheral edge, and a second mark made along a peripheral edge of said sheet at a second distance from said peripheral edge, said second distance being greater than said first distance, said first mark and said second mark being formed in different colors within 10 mm from said peripheral edge of said sheet.